UV Ozone Cleaner UV230

UV Ozone Cleaner UV230

The UV ozone cleaner is a surface cleaning device based on the synergistic effect of ultraviolet light and ozone. It is mainly used for the removal of organic contaminants and surface modification of inorganic substrates. It is widely applied in semiconductors, optoelectronics, industrial manufacturing and other fields, covering application scenarios such as LCD/OLED substrate pretreatment, wafer cleaning, and precision circuit board cleaning.

The core component of the equipment is a dual-wavelength (185 nm and 254 nm) low-pressure UV mercury lamp. The 185 nm UV light decomposes oxygen to generate ozone, while the 254 nm UV light excites ozone to produce reactive oxygen atoms. Organic substances are decomposed into volatile compounds such as CO₂ and H₂O through oxidation reactions.

Features

1. Low-pressure mercury vapor grid UV quartz lamp with a service life of more than 8,000 hours.

2. High-intensity UV light source with wavelengths of 185 nm and 254 nm.

3. UV lamp dimension: 23x23 cm. The size of the UV grid lamp reflector is larger than 24x24 cm.

4. The sample stage adopts constant temperature control and intelligent PID temperature regulation.

5. The temperature setting range is RT~200℃ with a temperature control accuracy of ±1℃.

6. Equipped with a 5-inch color touch screen for programmable intelligent control. Process parameters such as operation time, heating temperature and gas flow can be independently set with simple and convenient operation.

7. Flow rate, heating and UV lamp can be individually and automatically controlled for on/off respectively; the treatment process can be manually interrupted at any time.

8. Diverse combined treatment modes are available. Optional processing functions include sample stage heating and oxygen supply gas circuit switching.

9. Automatically save cleaning parameter settings and generate historical records to prevent loss of experimental data.

10. Adopts top-mounted sample stage and flip-top cover design, enabling convenient and fast sample loading and unloading.

11. Integrated sample stage with heating and lifting functions; the lifting stroke is 50 mm. The spacing between the lamp and samples is adjustable to realize reasonable positioning of sample height and placement.

12. Safety interlock function. When the upper cover of the cleaning chamber is opened during operation, the UV lamp will be automatically turned off with a pop-up prompt to prevent ultraviolet radiation injury to operators.

13. Dual gas circuit design with air inlet and air outlet. Digital flow display is provided as standard.

14. Oxygen access is supported to increase ozone output, and the gas supply flow is adjustable. Compatible with an ozone neutralizer for ozone elimination.

15. Overall product dimension: 50x36x25 cm; net weight: 15 kg.

Technical Parameters