Coating System Interconnection Equipment
The coating equipment is interconnected with other vacuum equipment and can be equipped with multiple sputtering chambers or processing chambers for production lines or experimental lines. By selecting the sample chamber, the ultra-high vacuum transition can be realized and the pollution to the coating system can be reduced.
Advantages
1.The splash coating layer is uniform, dense and has strong adhesion;
2.One-button automatic process;
3. Automatic loading and unloading sheet;
4.Multi-chamber structure.;
5.Good vacuum environment to achieve continuous production.
Technical Parameter
| Number of target materials | 2-4 |
| Wafer heating | Room temperature -400 ℃, temperature control accuracy ± 1% |
| Uneven distribution | ± 3% to ± 5% |
| Wafer adjustment | The distance between the substrate and the target material can be continuously adjusted |
| Wafer speed | 5-30rpm, continuously adjustable speed |
| Control system | Fully automated human-machine interface |
| Safety | Industrial standard safety interlock, alarm |
